发明名称 METHOD FOR CLEANING METAL MASK
摘要 A method for cleaning a metal mask is provided to suppress the twist and the deformation of mask and does not remain the mark like smudge. A method for cleaning a metal mask includes the step for washing the metal mask to the solvent dissolving the adhesive material adhering to the metal mask(S1,S2); the step for washing the metal mask from which the adhesive material is removed with the deionized water(S3); the step for drying the metal mask which is washed by the deionized water in a vacuum(S4). The drying of the metal mask is progressed as the drying temperature of 20~70°C and dry down time of 5~60 minutes. The adhesive material is the organic material. The metal mask was formed with the invariable steel. Solvent is the mixture of the organic solvent of the various kinds.
申请公布号 KR20080102989(A) 申请公布日期 2008.11.26
申请号 KR20080046632 申请日期 2008.05.20
申请人 KABUSHIKI KAISHA TOYOTA JIDOSHOKKI 发明人 SONE HIROTAKA
分类号 H01L21/302 主分类号 H01L21/302
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