MAP BUILDING SYSTEM FOR PROBING TESTER AND METHOD FOR BUILDING MAP USING THE SAME

摘要

A map generation system for the probing test apparatus and a map generation method using the same are provided to automatically transform the basic mapping data into the correction mapping data without the manual operation of operator. A map generation system for the probing test apparatus comprises the basis mapping data generation module for producing the basis mapping data about the target wafer(100); the error confirmation module(200) for confirming the error by measuring the coordinate of each semiconductor chip formed in using the camera and comparing the coordinate of the measured semiconductor chip with the coordinate of the semiconductor chip corresponding to the basis mapping data; the offset calculation module(300) for calculating the offset for correcting error; the coordinate correction module for revising the coordinate of each semiconductor chip of basis mapping data.