Method of evaluating semiconductor device

摘要

The present invention provides a semiconductor device having an active region bent at right angles, wherein an interval between patterns for the active region and a gate is set larger than an arc radius of a curved portion (portion where a line is brought to arcuate form) formed inside the pattern for the bent active region. By defining and designing the pattern interval, the curved portion of the active region do not overlap the gate pattern, and the difference between a device characteristic and a designed value can be prevented from increasing.