发明名称 |
Width adjustable substrate support for plasma processing |
摘要 |
An electrode assembly for use in a plasma processing system that includes removable rails that are adjustable for reconfiguring the electrode to accommodate substrates of different widths. The electrode assembly includes an electrode having a plurality of first connecting members. Associated with the electrode is a plurality of rails that cooperate for supporting the substrates on the electrode. Each of the rails includes a plurality of second connecting members. Each of the second connecting members is connected detachably with one of the first connecting members for removably mounting the rails with the electrode.
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申请公布号 |
US7455735(B2) |
申请公布日期 |
2008.11.25 |
申请号 |
US20050239570 |
申请日期 |
2005.09.28 |
申请人 |
NORDSON CORPORATION |
发明人 |
BOLDEN, II THOMAS V. |
分类号 |
C23C16/00;A47B91/00;A47H1/10;A47H1/14;B23Q3/00;B25B11/00;B25G3/22;C23F1/00;F16M13/00;H01L21/306;H01L21/683 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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