发明名称 |
Micro optical bench structure |
摘要 |
A micro optical bench structure and a method of manufacturing a micro optical bench structure are provided. The micro optical bench structure includes: a lower substrate; an upper substrate which is bonded to the lower substrate, and has a through-hole for exposing the lower substrate; and a first optical device which is installed at the lower substrate, and units relating to the first optical device.
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申请公布号 |
US7456434(B2) |
申请公布日期 |
2008.11.25 |
申请号 |
US20050033720 |
申请日期 |
2005.01.13 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM YONG-SUNG;CHUNG SEOK-WHAN;YOU JAO-HO;CHOI HYUNG;HWANG WOONG-LIN |
分类号 |
H01L27/15;H01S5/022;G02B6/12;G11B7/12;G11B7/135;G11B7/22 |
主分类号 |
H01L27/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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