发明名称 Light deflecting method and apparatus efficiently using a floating mirror
摘要 A light deflecting apparatus deflecting input light in directions for at least one deflection-axis includes a plate-like-shaped member configured to reflect input light, a substrate above which the plate-like-shaped member is placed with no fixed portion relative to the substrate, a supporting member serving as a fulcrum for the plate-like-shaped member to tilt, a plurality of space regulating members configured to regulate a space in which the plate-like-shaped member placed on the supporting member above the substrate is freely movable, and a plurality of electrodes arranged around the supporting member on the substrate and facing a bottom surface of the plate-like-shaped member.
申请公布号 US7457019(B2) 申请公布日期 2008.11.25
申请号 US20080014570 申请日期 2008.01.15
申请人 RICOH COMPANY, LTD. 发明人 NANJYO TAKESHI;KATOH SEIICHI;OHTAKA KOUICHI
分类号 G02B26/08 主分类号 G02B26/08
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