发明名称 Method of forming a structure for reducing lateral fringe capacitance in semiconductor devices
摘要 A semiconductor structure includes a plurality of conductive lines formed within an interlevel dielectric (ILD) layer and a non-planar cap layer formed over the ILD layer and the conductive lines, wherein the cap layer is raised with respect to the conductive lines at locations between the conductive lines.
申请公布号 US7456099(B2) 申请公布日期 2008.11.25
申请号 US20060420253 申请日期 2006.05.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CLEVENGER LAWRENCE A.;GRUNOW STEPHAN;KUMAR KAUSHIK A.;PETRARCA KEVIN S.;RAMACHANDRAN VIDHYA;STANDAERT THEODORUS E.
分类号 H01L21/4763;H01L21/44 主分类号 H01L21/4763
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