摘要 |
A substrate module and a method for manufacturing a flexible active matrix device are provided to solve a problem that the flexible substrate is not easily detached from a solid substrate, thereby improving production yield. A method for manufacturing a flexible matrix array substrate has following processes. A flexible substrate(120) and a solid substrate are bonded using adhesion layer including the colloid(112) and sacrificial body. An active matrix array process about the flexible substrate adhered on the hard board is performed. Some parts of the adhesion layer are vaporized by irradiating light to the adhesion layer. The flexible substrate is detached from the solid substrate. |