发明名称 |
Mechanical self-reciprocating oscillator and mechanism and a method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components |
摘要 |
A mechanical self-reciprocating oscillator and mechanism and method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components are provided. The fully mechanical micromachined oscillator and mechanism are driven using only a DC power source on at least one substrate such as a semiconductor chip. The oscillator and mechanism preferably include an electrothermal actuator, that, when actuated, opens a switch to cut off supply current to the actuator. Two versions of the oscillator and mechanism are provided using distinct hysteresis mechanisms, one structural and the other thermal.
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申请公布号 |
US7456698(B2) |
申请公布日期 |
2008.11.25 |
申请号 |
US20050038873 |
申请日期 |
2005.01.20 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN |
发明人 |
GIANCHANDANI YOGESH B.;UDESHI KABIR |
分类号 |
H02N10/00;F03G7/06;G01B7/34;H02M3/16;H02N1/00;H03B5/30 |
主分类号 |
H02N10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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