ALIGNMENT VISION METHOD AND DEVICE

摘要

A method and an apparatus for alignment vision are provided to increase the quality of photography image about the vision result by mounting the reflector at the bottom part of the tray imaging portion in the vision photography. An alignment vision method includes the step for setting up the vision at the picker in the initial setting of the equipment for semiconductor fabrication; the step for taking a picture of 3 outer corners of tray with the vision(13) of the picker(12) through the movements to the X direction of the picker and the Y direction of the tray; the step for calculating the offset value(X,Y,theta) of 3 point and the center of the tray(10); the step for calculating the exact location values of matrix structure using the tray information, the pocket number, and the pitch information.