发明名称 APPARATUS OF COATING ADHESIVE AND APPARATUS OF BONDING A DIE HAVING THE SAME
摘要 A coating apparatus of adhesive and a die bonding apparatus having the same are provided to coat the adhesive regardless of the die size. A coating apparatus of adhesive comprises the storage(100) storing the adhesive resin which uses when adhering the die separated from the discrete chip to the substrate; the showerhead(12) capable of adjusting the position and the amount of adhesive which is to be coated onto the substrate regardless of the die size. The showerhead comprises a plurality of slit nozzles which are replaceable. The showerhead includes the slit nozzle(12a) which is possible for the minute coating of the adhesive resin.
申请公布号 KR20080101965(A) 申请公布日期 2008.11.24
申请号 KR20070048168 申请日期 2007.05.17
申请人 SECRON CO., LTD. 发明人 JANG, CHEOL HO
分类号 H01L21/58 主分类号 H01L21/58
代理机构 代理人
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