发明名称 RELEASE APPARATUS OF CARRIER MODULE, TEST HANDLER HAVING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR USING THE SAME
摘要 A release apparatus of carrier module is provided to steadily test semiconductor devices by minimizing a large-size of a release unit. A release apparatus of carrier module comprises the followings: a frame(4) having a plurality of carrier modules, and holding the test tray; a release unit(3) including a release pin(31) releasing the carrier module, and forming the release area(B) for releasing the carrier module; a transport unit(5) successively positioning the carrier module of the test tray at the release area, and moving the frame; and a main body(2) combining the transport unit. The transport unit moves the test tray from the inner side of the main body to outer side of the main body. The release unit is combined in the main body.
申请公布号 KR20080102087(A) 申请公布日期 2008.11.24
申请号 KR20070048447 申请日期 2007.05.18
申请人 MIRAE CORPORATION 发明人 KIM, YONG SUN
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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