| 摘要 |
<p>[PROBLEMS] To provide a multi-joint robot with increased productivity, used for loading and unloading thin sheet-like workpieces, such as glass substrates for liquid crystal and semiconductor wafers, into and from a stocker. [MEANS FOR SOLVING THE PROBLEMS] The multi-joint robot (1) has a hand part (8) for placing an object to be carried; multi-joint arms (1) connected to the hand part (8), having at least two or more rotating joints (3, 4, 5), extending/retracting so as to move the hand part (8) in one direction, and disposed so as to face each other in the axial direction; a support member (10) for connecting together the multi-joint arms (2) and a moving mechanism (11) moving in the vertical direction; and a pedestal (13) installed on the moving mechanism (11) and having a swing function. A connection hole (23) is formed in the rotation center of at least one of the rotating joints (3, 4, 5).</p> |
