| 摘要 |
A coating device is provided to discharge the coating solution from a nozzle quickly without the increase of consumption of the coating solution and not to occur the shock of the solvent. A coating device includes a nozzle(31) discharging the coating solution to the surface of substrate; a pipe connected to nozzle; a coating solution supply unit(83,83a,83b) supplying the coating solution to the pipe; a solvent supply unit(84,84a,84b) supplying the organic solvent(86) to the pipe; and a control unit controlling a coating solution supply unit and a solvent supply unit. |
