| 摘要 |
An aqua knife having a sub chamber is provided to uniformly spray liquid for processing a surface of a substrate by transforming the structure of the aqua knife to automatically remove the particle in the body. A plurality of liquid supply ports supplies the liquid to the inside of the body. A spray slit(115) sprays the liquid to the body for processing the substrate surface. A main chamber formed inside of the body supplies liquid to the spray slit by uniformly spraying the liquid to the body length direction. An aqua knife(100) formed in the middle of the spray slit includes a sub chamber and uniformly re-spays liquid which is flowed along the spray slit before being sprayed. |
