发明名称 |
UNIT TRAY TRANSPORTING SYSTEM IN SINGULATION HANDLER |
摘要 |
<p>The semiconductor tray transferring system is provided to improve the efficiency of working process. The semiconductor tray transferring system is provided. The support stand(100) is fixed in the equipment body. The tray receiving part(200) is installed to slid before or after on the support stand. The sensor system(250) is installed at the tray receiving part and senses the predetermined stacking height of tray and informs the replacement time. The sensor unit(300) controls the location by sensing the state of before or after the tray receiving part is transferred. The cable bear(410) is combined with the bottom of bracket while being receiving to the wiring including the wiring of the sensor unit. The movable part(500) helps the sliding movement of tray. An unlocking part(600) has the locking free function for fixing and transferring the tray receiving part.</p> |
申请公布号 |
KR20080100864(A) |
申请公布日期 |
2008.11.21 |
申请号 |
KR20070046827 |
申请日期 |
2007.05.15 |
申请人 |
YOON, JUM CHAE;JEONG, BYEONG IL |
发明人 |
LEE, JUN WOO |
分类号 |
H01L21/68;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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