| 摘要 |
An Ag alloy thin film with superior heat resistance, corrosion resistance and cohesive power for the electromagnetic interference shielding is required as the material for the electromagnetic interference shielding, and the corrosion resistance and cohesive power are provided. Ag alloy target for the electromagnetic interference shielding comprise at least one element selected in the lanthanide consisting of the pr, nd, eu, dy and Er and Cu and Ag. The sum total selected in the crowd of the lanthanide consisting of the pr, nd, eu, dy and Er of element more than the first class added amount of the metal element is 0.05~3.5wt%, Cu 0.05~3.5wt%, remnant is Ag.
|
