摘要 |
The temperature device (10, 20) has a sensor on a base plate (31) with contacts (32, 33, 34) that contact the sensor. The sensor has a chip body (2, 12) with a recess that is covered by a membrane (13) and is manufactured via reactive ionisation. The sensor may have a heat-sensitive region (14) together with a row switch made from two thermo-electric materials |