| 摘要 |
PROBLEM TO BE SOLVED: To improve the sealing in a sensor capped by a thin film with additional inert gas together with raw gas in the field of a micro-mechanical structural member. SOLUTION: In a micro-mechanical structural member having a substrate 1, a thin film cap 4 and a cavity 6 limited by the substrate and the thin film while at least one vapor phase with the internal pressure is sealed in the cavity, the vapor phase has a non-atmospheric composition. Thus, arbitrary internal pressure can be realized in the cavity sealed by the thin film cap. In a conventional closing treatment, this pressure is limited to the treatment pressure to be used during the closing. COPYRIGHT: (C)2009,JPO&INPIT
|
