| 摘要 |
A spectral purity range (E 95 ) of a laser beam output from an amplifying laser device ( 300 ) is measured by spectral purity range measuring means. To have the measured spectral purity range (E 95 ) within an allowable range E 950 ±dE 95 of a target spectral purity range (E 950 ), discharge timing from a time when discharge is started by an oscillating laser device ( 100 ) to a time when discharge is started by the amplifying laser device ( 300 ) is controlled, and the spectral purity range (E 95 ) is controlled to be stabilized.
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