| 摘要 |
PROBLEM TO BE SOLVED: To form fine dot element shape magnetic storage elements suppressed in the variation of an element sizes by using an optical lithographic technology. SOLUTION: Manufacturing processes of the magnetic storage elements 30 and extraction electrodes 37 electrically connected to the elements include: a process for sequentially laminating an extraction electrode forming layer, an antiferromagnetic body layer 32, a magnetization fixing layer 33, a tunnel insulating layer 34, a recording layer 35, and a gap layer 36 on a third inter-layer insulating film 43 for covering a writing word wire 12; a process for forming the gap layer 36 and the recording layer 35 into a line pattern which straddles over the extraction electrode 37 to be formed in the short side direction; and a process for forming the line pattern and the layers from the tunnel insulating layer 34 to the extraction electrode 37 forming layer 81 to have a pattern shape. COPYRIGHT: (C)2009,JPO&INPIT
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