| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of simply carrying out three-dimensional shape measurement without adding an exclusive device and with less changes. SOLUTION: When carrying out three-dimensional shape measurement, a detection signal selecting signal generator of a reflection electron in a control part 15 controls a signal switching part 7 and a frame memory 9 by a selecting signal, the detection signal from semiconductor elements 6a to 6d at the signal switching part 7 is sequentially switched synchronized with a scanning frame on a sample 4 of an electron beam 2, and operation is carried out so that the detection signal from the semiconductor elements 6a to 6d will be sequentially recorded in a recording address corresponding to the semiconductor elements 6a to 6d in the frame memory 9. By these four times of electron scanning, image data for the three-dimensional shape measurement can be recorded in the frame memory 9, and processed by an arithmetic processing part 13 for the three-dimensional shape measurement, and its result can be displayed at a display part 14. The detecting signal selecting signal generator of the reflection electron of the control part 15 is constituted by including a counter or the like renewed by the frame scanning unit, and can be realized by a simple circuit or software. COPYRIGHT: (C)2009,JPO&INPIT
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