| 摘要 |
The invention relates to the acquisition of log data in an apparatus such as a substrate processing apparatus. The invention permits detailed data related to a premonitory phenomenon preceding the occurrence of an alarm condition to be acquired without increasing the amount of data. A data logging method of the invention has a constitution wherein a difference between the maximum value and the minimum value of the acquired data is determined, wherein a first segment of the acquired data is stored if the difference is not less than a preset value, and if the difference is less than the preset value, a second portion included in the first segment of the acquired data is stored.
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