| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a microwave processor that prevents leakage of electromagnetic wave and gas within a chassis from a clearance gap between an edge of an inspection port and an inspection lid. <P>SOLUTION: A microwave processor includes a chassis 1 for leading in an object to be processed and a microwave irradiation mechanism 2 arranged in place on the chassis 1, in which an inspection port 3 having an inspection lid 4 is formed. A seal member 5 is placed between an edge of the inspection port 3 and the inspection lid 4, and a metal touch structure is employed for the edge of the inspection port 3 and the inspection lid 4. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
