| 摘要 |
PROBLEM TO BE SOLVED: To exactly detect the presence or the absence of foreign matter even on a substrate having an undulating surface by creating a threshold value information used for determining the presence or not of the foreign matter based on a change in quantity of light received by an optical sensor for the whole surface of the upper surface of the substrate with no foreign matter stuck thereto. SOLUTION: The substrate processing apparatus is provided with a surface plate 1, an application head 3, sensors 4, 5 and a control part 8. The control part 8 stores in time series the detected signal of the sensors 4, 5 detected during the period of time that the application head 3 discharging no processing liquid moves along the moving direction Y1 and the control part 8 forms the threshold value data of the data detected continuously along the moving direction Y1 based on the stored content. While the application head 3 discharging processing liquid moves on the whole upper surface of the substrate 100, the control part 8 determines the presence or not of the foreign matter on the upper surface of the substrate 100 based on the result obtained by comparing between the detected data and the threshold data and controls the movement of the application head 3 based on the determination result. COPYRIGHT: (C)2009,JPO&INPIT
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