| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spin coater that is capable of stabilizing the temperature of an ultraviolet-curable resin composition upon spreading in each spin coating process in a short time, and of spreading the ultraviolet-curable resin composition over the surface of a disc substrate in a uniform thickness over multiple spin coating processes without performing large numbers of unproductive spin coating processes and to provide a temperature controlling method of the spin coater. <P>SOLUTION: The spin coater includes a rotation table, a spin-cup that surrounds the outer circumference of a disc substrate held on the rotation table, a dropping unit, a rotating unit configured to rotate the disc substrate via the rotation table to spread the ultraviolet-curable resin composition over the surface of the disc substrate, a heating unit configured to heat the ultraviolet-curable resin composition on the disc substrate, and a temperature controlling unit configured to control a reaching temperature of the spin cup so as to be constant over multiple spin coating processes while the temperature is increased by the heating unit each time the ultraviolet-curable resin composition is spread. <P>COPYRIGHT: (C)2009,JPO&INPIT |
