| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate supporting device for easily mounting a backup pin to the accurate position, a mounting method of backup pin in the same device, an actual mounting apparatus, and a backup plate. <P>SOLUTION: The substrate supporting device 7 is provided with a supporting device body and a backup plate 75 to load and unload the backup pin 71 for supporting the substrate W. The backup plate 75 is constituted with a transparent material and is unloadably loaded to the supporting device body 73. <P>COPYRIGHT: (C)2009,JPO&INPIT |
