| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern correction method capable of correcting an electrode disconnection part or the like with a thin wire of about 10μm and reducing contamination around a defective part. SOLUTION: In the pattern correction method, a film 3 is irradiated with a laser beam to form a hole 3a in a shape based on the defective part 2a, the opening of the hole 3a is made to face the defective part 2a with a prescribed gap, correction paste 10 is attached to the distal end of an application needle 9 and is made to stand by for prescribed time, then the application needle 9 is lowered, the film 3 is pressurized to a substrate 1 in a prescribed range including the hole 3a, and the correction paste 10 is applied to the detective part 2a through the hole 3a. Thus, since the correction paste 10 is attached to the distal end of the application needle 9 and is made to stand by for the prescribed time, the amount of the correction paste 10 on a flat surface 9a at the distal end of the application needle 9 is reduced, and the correction paste 10 is prevented from intruding a gap between the film 3 and the substrate 1. COPYRIGHT: (C)2009,JPO&INPIT
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