SURFACE DEFECT INSPECTION SYSTEM, METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To enhance the detection precision of surface defects even if the surface of a measurement target is not flat. SOLUTION: A surface defect inspection system detects the surface defects of a measurement target 2 by continuously shifting an irradiation position to the measurement target 2 of linear laser beams modulated periodically and capturing reflection light from the measurement target 2 by a delay integration type camera 30. The system includes: a phase calculation section 505 for calculating the deviation of phase at each position in a striped image obtained by sequentially arranging optically cut images obtained by the camera 30; and a phase continuation processing section 506 for making the phase continuous by detecting a position where the deviation of the phase is discontinuous based on the deviation of the phase obtained by the phase calculation section 505 and connecting the deviation of the phase at the detected position. The phase continuation processing section 506 detects a level difference in phase characteristics that are made continuous after processing for allowing the deviation of the phase to be continuous and further performs level difference correction processing for eliminating the level difference. COPYRIGHT: (C)2009,JPO&INPIT