COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating head capable of preventing occurrence of solid material or a gel at the tip part of a nozzle, the settling of fine particles due to aggregation or sticking in the nozzle and to suppress occurrence of defects such as coating unevenness or stripes on a coating film on a base material to be coated. SOLUTION: In the coating head having the nozzle for discharging a solution, the settling and the sticking of materials in the nozzle are suppressed by arranging a metallic wire or a metallic plate to which voltage is applied inside the nozzle and applying the voltage of irreversible potential to the nozzle. As a result, the coating apparatus free from occurrence of the defects such as the coating unevenness or the stripes on the coating film on the material to be coated is attained. COPYRIGHT: (C)2009,JPO&INPIT