发明名称 Material for Forming Capacitor Layer and Method for Manufacturing the Material for Forming Capacitor Layer
摘要 An object of the present invention is to provide a material for forming a capacitor layer comprising a dielectric layer formed by any one of a sol-gel method, an MOCVD method, and a sputtering deposition method. The material can reduce a leakage current of a capacitor circuit. In order to achieve the object, a material for forming a capacitor layer comprising a dielectric layer between a first conductive layer to be used for forming a top electrode and a second conductive layer to be used for forming a bottom electrode, characterized in that the dielectric layer is a dielectric oxide film formed by any one of a sol-gel method, an MOCVD method, and a sputtering deposition method; and particles constituting the dielectric oxide film are impregnated with a resin component is employed. In addition, a manufacturing method characterized in that the dielectric oxide film is formed on the surface of a material to be the bottom electrode by any one of a sol-gel method, an MOCVD method, and a sputtering deposition method; a resin varnish is impregnated into a surface of the dielectric oxide film; the resin is dried and cured to form the dielectric layer; and then a top electrode constituting layer is provided on the dielectric layer is employed.
申请公布号 US2008283283(A1) 申请公布日期 2008.11.20
申请号 US20060912716 申请日期 2006.04.28
申请人 MITSUI MINING & SMELTING CO., LTD. 发明人 ABE NAOHIKO;SUGIOKA AKIKO;KANNO AKIHIRO;NAKASHIMA HIROTAKE
分类号 H05K1/18;B05D5/12 主分类号 H05K1/18
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