METHOD AND SYSTEM FOR CONTROLLING THE UNIFORMITY OF A BALLISTIC ELECTRON BEAM BY RF MODULATION

摘要

A method and system (500) for treating a substrate using a ballistic electron beam (135) is described, whereby the radial uniformity of the electron beam flux is adjusted by modulating the source radio frequency (RF) power. For example, a plasma processing system is described having a first RF power coupled to a lower electrode (120), which may support the substrate (125) a second RF power coupled to an upper electrode (172) that opposes the lower electrode, and a negative high voltage direct current (DC) power (150) coupled to the upper electrode to form the ballistic electron beam. The amplitude of the second RF power is modulated to affect changes in the uniformity of the ballistic electron beam flux.