METHOD FOR MANUFACTURING DIELECTRIC MULTILAYER FILM FILTER AND MANUFACTURING DEVICE FOR DIELECTRIC MULTILAYER FILM FILTER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a dielectric multilayer film filter with improved wavelength selectivity and to provide a manufacturing device for a dielectric multilayer film filter. SOLUTION: A first chamber FL and a second chamber FH mount targets 18 made of dielectric materials having the respective refractive indices or essentially comprising conductive elements included in the dielectric materials, and low refractive index layers and high refractive index layers are formed by sputtering the targets 18. Upon sputtering the respective targets 18 in the first chamber FL and in the second chamber FH, the corresponding bias power supply G1 is driven to apply a negative bias potential to a substrate 2 while the corresponding heat exchanger HX is driven to control the temperature of the substrate 2 to room temperature. COPYRIGHT: (C)2009,JPO&INPIT