| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology useful for miniaturizing a force detection device without damaging reliability or characteristics of the force detection device. SOLUTION: This force detection device 1 is equipped with a semiconductor substrate 20 provided on the surface with a force detection part 60 for generating an electric signal corresponding to a working force, a semiconductor circuit substrate 220 provided on the surface with a circuit part 222 for processing the electric signal, and insulating blocks 50, 250 provided between the surface of the semiconductor substrate 20 and the surface of the semiconductor circuit substrate 220. The blocks 50, 250 have through-electrodes 52, 54, 252, 254 extending from a surface in contact with the semiconductor substrate 20 to a surface in contact with the semiconductor circuit substrate 220. The through-electrodes 52, 54, 252, 254 provide an electric signal from the force detection part 60 to the circuit part 222. COPYRIGHT: (C)2009,JPO&INPIT
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