| 摘要 |
PROBLEM TO BE SOLVED: To provide a cylinder cabinet capable of reducing a load of a damage preventive device by controlling exhaust quantity of process gas from the cylinder cabinet and reducing device cost of a process gas supplying facility and maintenance cost of the damage protective device while maintaining sufficient safety. SOLUTION: This cylinder cabinet 11 is furnished with an exhaust air passage 41 connected to a vacuum exhaust means through an exhaust valve by branching it from a gas supplying passage 22 through a high pressure side exhaust valve 26 and a low pressure side exhaust valve 31, a main exhaust air passage 43 furnished with a main exhaust valve 42, a flow rate adjusting means 44 and an auxiliary exhaust valve 45 provided in the main exhaust air passage in parallel and gas flow rates of which are controlled less than a gas flow rate of the main exhaust air passage are provided as the exhaust air passage 41, and a valve control part to change the main exhaust valve and the auxiliary exhaust valve over to each other to open and close is provided. COPYRIGHT: (C)2009,JPO&INPIT
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