WORKING DEVICE THAT PERFORMS REMOTE MAINTENANCE ON SEMICONDUCTOR MANUFACTURE/INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a working device, which performs remote maintenance on a semiconductor manufacture/inspection apparatus, capable of safely giving the apparatus information accumulated in each semiconductor manufacture/inspection apparatus to a maintenance operator within the scope authorized by a user.

SOLUTION: The working device performs remote maintenance on a semiconductor manufacture/inspection apparatus connected via the Internet. This working device receives enciphered information on the apparatus that shows the troubled status, and deciphers the information on the apparatus by receiving a common key used at the time of encryption. While the working device outputs the whole or part of the information on the apparatus, it generates event information indicating that the user of the working device has specified the cause of the trouble.

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