| 摘要 |
PROBLEM TO BE SOLVED: To provide a stamp apparatus capable of suppressing the enlargement of a coating film at the periphery of an intersection portion and forming the coating film of a desired pattern on a substrate. SOLUTION: Because a stamp surface 2e is formed of an elastic body, when the stamp surface 2e is brought into close contact with the substrate surface 16 of the substrate 14, a second stamp portion 10b, a fourth stamp portion 10d, and a sixth stamp portion 10f existing in the vicinity of the intersection portion 10g have elastic deformation larger than those in regions other than the intersection portion 10g with respect to the same pressure. Thus, according to the stamp apparatus 1 of this embodiment, the width of the second stamp portion 10b is changed from a width W1 to a width W1' toward in the X direction to become narrower in a tapered shape. Namely, the second stamp portion 10b is made gradually narrower in accordance with the elastic deformation becoming gradually larger toward in the X direction, thereby the elastic deformation near the intersection portion 10g can be made to be deformation along two first extension lines E1, so that a pattern having the width W1 can be formed. COPYRIGHT: (C)2009,JPO&INPIT
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