| 摘要 |
PROBLEM TO BE SOLVED: To provide a management method and a management device for an electroless plating liquid where the point of time at which a deteriorated electroless plating liquid is exchanged is correctly and easily detected. SOLUTION: Regarding the management method for an electroless plating liquid where, in plating treatment using an electroless plating liquid comprising metal ions and a reducing agent, the point of time at which an electroless plating liquid deteriorated in accordance with the progress of the plating treatment is exchanged is detected, the point of time at which the electroless plating liquid is exchanged is detected in accordance with the change in the electric conductivity of the electroless plating liquid. The management device for an electroless plating liquid where the point of time at which an electroless plating liquid deteriorated in accordance with the progress of the electroless plating treatment is exchanged is detected comprises: a measurement means for measuring the electric conductivity of the electroless plating liquid; and a detection means for detecting the point of time at which the electroless plating liquid is exchanged in accordance with the change of the measured electric conductivity. COPYRIGHT: (C)2009,JPO&INPIT
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