申请人 |
SHIN-ETSU QUARTZ PRODUCTS CO., LTD.;OPTO-ELECTRONICS LABORATORY, INC.;UEDA, TETSUJI;OHUCHI, MICHINARI;NISHIMURA, HIROYUKI;FUJINOKI, AKIRA;NAKATSUKA, MASAHIRO;YOSHIDA, HIDETSUGU |
发明人 |
UEDA, TETSUJI;OHUCHI, MICHINARI;NISHIMURA, HIROYUKI;FUJINOKI, AKIRA;NAKATSUKA, MASAHIRO;YOSHIDA, HIDETSUGU |