MIRROR MAGNETRON PLASMA SOURCE

摘要

A new and useful plasma source (100) is provided, comprising at least one electrode (29) connected to an alternating current power supply and disposed adjacent to a portion of a grounded substrate (2). The electrode has a center magnet (3) that produces a magnetron plasma (16) at the electrode (29) when the electrode is biased negative by the alternating power supply, and a mirror plasma (15) on the substrate (2) when the electrode (29) is biased positive by the alternating power supply.