| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device 1 for transferring a structure provided in a mask 2 onto a substrate 3. <P>SOLUTION: A device is provided which is provided with: at least one illumination device 9 for uniformly irradiating a part of the mask 2; a mask holding device 7 for holding the mask 2 in a mask plane 8 defined by an X axis and a Y axis perpendicular to the X axis; at least one lens arrangement 6 arranged above the mask plane 8 on the side opposite to the illumination device 9 to map the structure onto the substrate 3; a substrate holding device 4 arranged a distance spaced apart from the lens arrangement 6 so that the substrate 3 may be held in a substrate plane 5 parallel to the mask plane 8; and a means for synchronously moving the illumination device 9 and the lens arrangement 6 in parallel, relatively to the mask plane 8 and the substrate plane 5 along the X axis and/or the Y axis. <P>COPYRIGHT: (C)2009,JPO&INPIT |
