| 摘要 |
PROBLEM TO BE SOLVED: To provide a high viscosity synthetic quartz glass body having high temperature viscosity properties equal to those of natural quartz glass, and hard to deform even in a high temperature environment , particularly, a transparent synthetic quartz glass body and a black synthetic quartz glass body. SOLUTION: The dense synthetic quartz glass body is obtained by bringing a hydroxy group-containing silica porous glass body into vapor phase reaction in a volatile silicon compound other than silane halide and thereafter firing the porous glass body. The synthetic quartz glass body has high temperature viscosity properties equal to those of natural quartz glass, and hard to deform even in a high temperature environment. COPYRIGHT: (C)2009,JPO&INPIT
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