发明名称 MOLD FOR GENERATING NANOSTRUCTURES, AND MOLD HOLDER UNIT
摘要 <p>In a method for fabricating a mold (228, 230) for generating nanostructures a sequence (200) of layers comprising a first layer (202) and a second layer (204) is provided, a third layer (208) is provided on a first surface (206) formed by the first layer (202) and the second layer (204), wherein the material of the first layer (202) and the material of the second and third layers (204, 206) are selectively processable with respect to each other; and a second surface (210) formed by the first layer, the second layer (204) and the third layer (208) is processed to remove a portion of the material of the first layer (202) or a portion of the material of the second and third layers (204, 208), or to add material to the first layer (202) or to the second and third layers (204, 208) to generate a 3-D surface profile.</p>
申请公布号 WO2008138361(A1) 申请公布日期 2008.11.20
申请号 WO2007EP04109 申请日期 2007.05.09
申请人 TECHNISCHE UNIVERSITAET MUENCHEN;HARRER, STEFAN;STROBEL, SEBASTIAN;LUBER, SEBASTIAN;SCARPA, GIUSEPPE;BRUNETTI, FRANCESCA;LUGLI, PAOLO;TORNOW, MARC;ABSTREITER, GERHARD 发明人 HARRER, STEFAN;STROBEL, SEBASTIAN;LUBER, SEBASTIAN;SCARPA, GIUSEPPE;BRUNETTI, FRANCESCA;LUGLI, PAOLO;TORNOW, MARC;ABSTREITER, GERHARD
分类号 G03F7/00 主分类号 G03F7/00
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