| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the complexity and cost of a sensor and inertial measuring system, or a system similar to this. <P>SOLUTION: A two-axes rate sensing MEMS system is provided. The system includes two proof masses, two drive components, two drive sense components, two orthogonal sets of substrate electrodes, and a processing device. The processing device is in signal communication with the two proof masses, the two sense components, or the two sets of substrate electrodes. The processing device determines the rate of rotation about two orthogonal axes based on signals received from the two proof masses, the two sense components, or the two substrate electrodes. Rotation about one axis induces proofmass motion in the plane of the substrate. Rotation about an orthogonal axis induces proofmass motion out-of-plane of the proofmasses. The sensing scheme independently detects these proof mass motions, which can infer rate of rotation. <P>COPYRIGHT: (C)2009,JPO&INPIT |
