| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piping unit which can clean the interior of a treatment liquid feed line by effectively removing a pollutant sticking to the interior of the treatment liquid feed line, and can be easily connected with the existing treatment liquid feed line without changing the feed line significantly, and to provide a cleaning method of the treatment liquid feed line. <P>SOLUTION: This piping unit 30 has connections with a chemical solution A and a chemical solution B feed lines 12A and 12B on the upstream side and a connection with a treatment tank 20 on the downstream side. Further, the piping unit 30 has ramified connections with a device-side chemical solution A and a device-side chemical solution B feed line 13A and 13B for feeding a treatment liquid to be fed from the chemical solution A and chemical solution B feed lines 12A and 12B, to the treatment tank 20. In addition, the piping unit 30 is provided with a branch pipe 31 which is ramified and connected to the device-side chemical solution A and chemical solution B feed lines 13A and 13B in the way that both feed lines 13A and 13B can be switched, a rapid flow line 34 and a slow flow line 35 ramified and connected, in parallel, with the branch pipe 31 and a valve 37 for opening/closing the rapid flow line 34. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
