MANUFACTURING METHOD FOR NOZZLE SUBSTRATE, LIQUID DROPLET EJECTION HEAD AND LIQUID DROPLET EJECTOR

摘要

PROBLEM TO BE SOLVED: To obtain a manufacturing method or the like for a nozzle substrate which can form a desired nozzle shape. SOLUTION: The manufacturing method includes the process of opening a nozzle supply port 31B-1 from one surface side of a silicon substrate 51 and forming a recess to be a nozzle 31, the process of applying a liquid substance and forming a coating film 54 which covers a surface which has the recess to be the nozzle 31, and the process of forming a nozzle ejection port 31A-1 by performing anisotropic wet etching and penetrating the recess from a surface of the opposite side to the surface which has the recess to be the nozzle 31. COPYRIGHT: (C)2009,JPO&INPIT