发明名称 SEMICONDUCTOR LAYER FOR THIN FILM TRANSISTORS
摘要 A method for making a zinc oxide semiconductor layer for a thin film transistor using solution processing at low temperatures is disclosed. The method comprises making a solution comprising a zinc salt and a complexing agent; applying the solution to a substrate; and heating the solution to form a semiconductor layer on the substrate. A thin film transistor using this zinc oxide semiconductor layer has good mobility and on/off ratio.
申请公布号 US2008286907(A1) 申请公布日期 2008.11.20
申请号 US20070749419 申请日期 2007.05.16
申请人 XEROX CORPORATION 发明人 LI YUNING;ONG BENG S.
分类号 H01L21/208 主分类号 H01L21/208
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