| 摘要 |
A method for manufacturing a semiconductor device is provided. The method includes forming a negative photoresist layer on a semiconductor substrate, forming a photoresist pattern on the negative photoresist layer, forming a well region in the semiconductor substrate, implanting ions into the semiconductor substrate, using the photoresist pattern as a mask, such that the ions are implanted into the well region, removing the photoresist pattern, and forming a gate region and a source/drain region on the semiconductor substrate.
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