| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor that is miniaturized, generates a bias signal, and raises the detection sensitivity. <P>SOLUTION: A detection processing circuit 4 includes a driving circuit 12 for current-carrying a driving signal to a drive electrode 6 and vibrates a detecting element 2, a detecting circuit 14 for detecting the angular velocity and acceleration based on the detection signal output from a detection electrode 10 due to the angular velocity and acceleration applied to the detecting element 2, and a monitoring circuit 16 for monitoring the vibrational state of the detecting element 2 based on the monitor signal output from the monitoring electrode 8. The detection signal includes a temperature dependency signal component varying due to the ambient temperature of the detecting element 2, so that the detection processing circuit has a bias signal generating circuit 22 for generating a bias signal component for offsetting the temperature dependency signal component. <P>COPYRIGHT: (C)2009,JPO&INPIT |
