| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a calibration method of a laser beam machining apparatus capable of calibrating a laser beam machining apparatus without forming any machining trace on a workpiece with high accuracy, and the laser beam machining apparatus. <P>SOLUTION: The calibration method comprises a step of radiating guide beam G to at least three different positions on a workpiece 16 by changing the input at the beam radiation designation position on a control mechanism of an optical scanning means, a step of acquiring the state of radiation of the guide beam G as an image by a camera for observation provided immediately above the workpiece 16 every time when the guide beam is radiated on the workpiece, a step of measuring the guide beam radiation center position in the image by the image processing, and a step of statistically obtaining the conversion coefficient for calibrating the optical scanning means from the beam radiation designation position input in the control mechanism and the guide beam radiation center position measured from the image corresponding to the beam radiation designation position. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
